Linear integrated circuits and applications 4 min read
Limited source diffusion
A plot of the concentration profile (normalized with respect to Cs) , at various times, is given here. Figure 6.2.…
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Linear integrated circuits and applications 6 min read
Physical vapor deposition and chemical deposition
Collimated and Ionized Metal Plasma (IMP): There are some more advanced techniques in the PVD. One is called collimated PVD. Another…
Linear integrated circuits and applications 10 min read
Deposition Techniques
In this chapter we will see various deposition techniques that are used in microelectronic fabrication. If a material like copper…
Linear integrated circuits and applications 6 min read
OXIDATION
In semiconductor manufacturing the term “oxidation” is used to refer the conversion of silicon to silicon dioxide. This can be…
Linear integrated circuits and applications 5 min read
Ion Implanatation – non idealities
Why are the neutral atoms removed from the beam just before deposition? The total quantity of impurities added is measured…
Linear integrated circuits and applications 4 min read
Ion Implanatation
We saw that material can be deposited on the silicon wafer by various techniques such as PVD, CVD etc. The methods which…
Linear integrated circuits and applications 5 min read
Diffusion basics & constant source diffusion
In the previous chapter, we saw that the silicon should be changed to “N” type or “P” type by adding…
Linear integrated circuits and applications 3 min read
ETCHING
Etching PCB is to use the materials of chemical reactions or physical impact of technologies that are removed. Etching techniques…
Linear integrated circuits and applications 3 min read
X-ray Lithography
X-ray lithography uses collimated x-rays as the exposing energy. Being much shorter in wavelength than light, even DUV light, x-rays provide…
Linear integrated circuits and applications 3 min read
Optical Lithography
The name optical lithography comes from the early application where the exposing energy was visible light. While those wavelengths can…
Linear integrated circuits and applications 2 min read
Lithographic Processes
The process of lithographically fabricating microcomponents is analogous to printing a photograph in a darkroom. In phorography, an energy sensitive…
Linear integrated circuits and applications 4 min read
Photomask manufacture
Photomasks used for optical lithography contain the pattern of the integrated circuits. The basis is a so called blank: a glass…