Measurement and instrumentation
Active and passive instruments
Introduction We can divide instruments into active and passive according to the consumption of power.”Active” means is that…
August 19, 2021 · JacobAuthor: Jacob
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Measurement and instrumentation
Introduction to measurement
Measurement techniques have been of immense importance ever since the start of human civilization, when measurements were first…
August 19, 2021 · JacobLinear integrated circuits and applications
Chemical mechanical planarization (CMP)
The production level CMP tool will be approximately 6 feet tall and 8 feet in diameter. It has…
August 19, 2021 · JacobLinear integrated circuits and applications
Dry etching
In dry etching, chemical reaction occurs between the material on the wafer and the gases. In this method,…
August 19, 2021 · JacobLinear integrated circuits and applications
Wet Etching
We saw that during deposition, it is not possible to deposit a material only in the places that…
August 19, 2021 · JacobLinear integrated circuits and applications
Diffusion- production issues
Dopant redistribution: The doped silicon is oxidized in some places, as part of the process sequence. The dopants which…
August 19, 2021 · JacobLinear integrated circuits and applications
Limited source diffusion
A plot of the concentration profile (normalized with respect to Cs) , at various times, is given here.…
August 19, 2021 · JacobLinear integrated circuits and applications
Physical vapor deposition and chemical deposition
Collimated and Ionized Metal Plasma (IMP): There are some more advanced techniques in the PVD. One is called collimated…
August 19, 2021 · JacobLinear integrated circuits and applications
Deposition Techniques
In this chapter we will see various deposition techniques that are used in microelectronic fabrication. If a material…
August 19, 2021 · JacobLinear integrated circuits and applications
OXIDATION
In semiconductor manufacturing the term “oxidation” is used to refer the conversion of silicon to silicon dioxide. This…
August 19, 2021 · Jacob