Active and passive instruments
Introduction We can divide instruments into active and passive according to the…
Introduction to measurement
Measurement techniques have been of immense importance ever since the start of…
Chemical mechanical planarization (CMP)
The production level CMP tool will be approximately 6 feet tall and …
Diffusion- production issues
Dopant redistribution: The doped silicon is oxidized in some places, as part of…
Physical vapor deposition and chemical deposition
Collimated and Ionized Metal Plasma (IMP): There are some more advanced techniques in…
