Functional Testing
FBM: In the memory region, the bits are arranged in rows and columns. If…
Testing Basics
Basics: In this chapter we will learn the details of testing a…
Chemical mechanical planarization (CMP)
The production level CMP tool will be approximately 6 feet tall and …
Diffusion- production issues
Dopant redistribution: The doped silicon is oxidized in some places, as part of…
Limited source diffusion
A plot of the concentration profile (normalized with respect to Cs) ,…
Physical vapor deposition and chemical deposition
Collimated and Ionized Metal Plasma (IMP): There are some more advanced techniques in…
Deposition Techniques
In this chapter we will see various deposition techniques that are used…
OXIDATION
In semiconductor manufacturing the term “oxidation” is used to refer the conversion…


